An Experimental Approach to Sensors Silicon Forced
DOI:
https://doi.org/10.61841/6rhmrv39Keywords:
Force sensor, Comsol Multiphysics, piezo-resistorAbstract
According to this literature, a silicon forced sensors is offered by which the measurement of the force is calculated by means of force exerted on the gauge made up of polysilicon. Particular gauge is stressed by a metallic plate on which the maximum force of 500 kN is applied. The total force is calibrated with the change in resistance. Our model is constructed for the temperature change and the plane sketching and the bending of the stresses into the chip. Piezo-resistive module made up of the “Comsol Multiphysics 4.3” is employed for the simulation purposes.
Downloads
References
1] S. Gong, W. Ma, and T. N. Dinh, “Diagnostic techniques for the dynamics of a thin liquid film under forced
flow and evaporating conditions,” Microfluid. Nanofluidics, 2010.
[2] D. A. B. Miller, “Optical interconnects to electronic chips,” Appl. Opt., 2010.
[3] M. Hautefeuille, B. O’Flynn, F. Peters, and C. O’Mahony, “Miniaturised multi-MEMS sensor development,”
Microelectron. Reliab., 2009.
[4] A. Prisacaru, A. Palczynska, P. J. Gromala, B. Han, and G. Q. Zhang, “Condition Monitoring Algorithm for
Piezoresistive Silicon-Based Stress Sensor Data Obtained from Electronic Control Units,” in Proceedings -
Electronic Components and Technology Conference, 2017.
[5] J. MLYNARCZYK, E. SPIRIT, and A. BULGHERONI, “DESIGN OF A MONOLITHIC ACTIVE PIXEL
SENSOR IN ST 0.13UM TECHNOLOGY,” 2009.
[6] COMSOL, “Introduction to COMSOL Multiphysics 5.3,” Manual, 2014.
[7] G. Fiorenza, V. Manzari, C. Pastore, I. Sgura, M. Torresi, and C. Gargiulo, “An innovative polyimide
microchannels cooling system for the pixel sensor of the upgraded ALICE inner tracker,” in Proceedings of
the 2013 5th IEEE International Workshop on Advances in Sensors and Interfaces, IWASI 2013, 2013.
Downloads
Published
Issue
Section
License

This work is licensed under a Creative Commons Attribution 4.0 International License.
You are free to:
- Share — copy and redistribute the material in any medium or format for any purpose, even commercially.
- Adapt — remix, transform, and build upon the material for any purpose, even commercially.
- The licensor cannot revoke these freedoms as long as you follow the license terms.
Under the following terms:
- Attribution — You must give appropriate credit , provide a link to the license, and indicate if changes were made . You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
- No additional restrictions — You may not apply legal terms or technological measures that legally restrict others from doing anything the license permits.
Notices:
You do not have to comply with the license for elements of the material in the public domain or where your use is permitted by an applicable exception or limitation .
No warranties are given. The license may not give you all of the permissions necessary for your intended use. For example, other rights such as publicity, privacy, or moral rights may limit how you use the material.